RF PLASMA CONTROL
2000W (9KV) Automatic Matching Network
SEM/TEM sample prep Vac Techniche
2000w (9KV) Automatic Matching Network for RF plasma control changes the RF Generated impedance of the plasma chamber to 50 ohms to reach the maximum power from the generator to the chamber. The Vac Techniche automatic matching networks perform their operation in three independent modes.
The automatic mode continuously compensates for the impedance variation of the plasma enclosure. The manual mode allows the operator to change the matching capacitance values during the process.
In the preset mode, the operator can automatically adjust the capacitance values close to the complete matching condition at the outset so that the matching is performed faster.
The various parameters can be adjusted, and their performance is observed via the front panel of the controller system and the VGA connections. Some of the special applications of this device are plasma production for various uses, such as the different stages of deposition (cleaning, etching, sputtering, etc.), as well as the fabrication of microelectronics components in the nanotechnology field.
Features and Capabilities
Automatic matching of a wide range of impedances
• Control/display of all parameters
• Complete remote control capability
• Three operation modes: manual, automatic, and preset
• Digital display of capacitor locations and capacitor limitation alarms
• Location adjustment for the capacitors in manual mode using a digital rotary encoder in the control panel
• Unit control box installable in a rack
• Separate match box installable near the enclosure
• Reserve capacitor sets and inductor change tabs for increasing the load impedance range
• Adequate shielding for preventing radiation and EMI noise with necessary arrangements for protecting operator health.
Technical Specifications
Applied Power | 220 (200-240) V, 50 (50-60) Hz |
Maximum Input Power | 2000 W for standard load such as sputtering gun (limited to voltage 9KV and current 40 A) |
Frequency (MHz) | 13.56 |
Band width | 5% |
Matching network controlling connector | VGA |
Working modes | Manual, Automatic, Preset |
Matching speed | Depending on the load conditions between 5 and 30 seconds and when following the matching point is less than 5 seconds. |
Controller characteristics | when capacitors reach to the beginning and end, an alarm will be activated.It has two steps (quick and accurate) for the tuning the location of capacitors.It has a digital display of the location of capacitors.It has a LED to show the mode.It has a screw in priest mode to adjust capacitors locationadjustable gain of control loop for achieving optimal speed and stability |
Circuit topology | L Network |
Voltage-Current-Capacity of Capacitors | 9KV-40A-250PF |
Output impedance | A wide range. It performs matching for the standard sputtering cathode to a wide range. |
Working temperature | 10-40 C |
Cooling | Air-cooled via Fan |
Input Connector | Female N |
Output connector | 7/16 or direct connectiion |
Dimesiond | 13*41*17 (length*width*height) |
Weight | about 5 Kg |
Box Material | Aluminium |