DST1-300 Turbo-Pumped Sputter Coater
Desktop Sputter System
Vac Techniche Vacuum Coating Systems
With one of the smallest benchtop footprints, DST1-300 provide DC and RF sputtering for high resolution SEM and TEM sample preparation.
The DST1-300 range provides the following versions to satisfy most laboratory applications.
The DST1-300 range provides
Desktop Sputter System
following versions to satisfy most laboratory applications.
DST1-300
Single magnetron, DC, RF, sample Bias, sample heating, Sample rotation.
DST2-A
Two magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation.
DST2-TA
Two magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
DST1-S
Two magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
DST2-TS
Two magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
DST3-A
Three magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation.
DST3-TA
hree magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
DST3-S
Three magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation.
DST3-TS
Three magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation for carbon, wire or boat
4″ magnetron option is also available.
DST1-300 Clean VacuumChamber
DST1-L to DST3: The vacuum chamber is a Cylindrical Pyrex with 300 mm OD and 200 mm H (DST1-4) / 170 mm OD x 140 mm
H (DST1-2). Fitted with an internally mounted turbomolecular pump, backed by a diaphragm pump which introduces clean vacuum without oil contamination which normally present in ordinary diffusion pump.
DST1-300 Turbo-Pumped Sputter Coater More Details
High vacuum turbo pump.
Diaphragm backing pump.
Full range vacuum gauge.
High precision quartz crystal thickness monitor.
Intuitive touch screen to control the coating process and rapid data input
User friendly software that can be updated via network.
Controls coating rate to achieve finer grain structures.
Manual Timed and Thickness sputtering.
Able to record and plot coating parameters graphs.
Automated or semi-automated control.
Equipped with electronic shutter.
Easy-to-change specimen stages (rotation stage as standard).
Two-year warranty.
Ultimate Vacuum: Less than 2×10-5 torr.
Controls the rate of sputtering to achieve finer grain structure.
Automatically controls the power of sputtering independent of pressure.
Precision Mass Flow meter (MFC) for fine control of the vacuum pressure
Able to record and plot coating parameter graphs.
Transfers curves and deposition process data by USB port to PC.
Utilities: 220V- 50HZ- 16A.
Shipping Weight (DST1-3): 46kg
DST1-L, Turbo – Pumped Desktop Sputter Coater:
The large chamber Single magnetron water cooled desktop sputter coater model DST1-L is Vac Coats’ larger coating system having a separate control rack, with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time. equipped with a single magnetron cathode with diameter of the cathode could be 2-4 inches depending on the requirement, RF, sample heating upgrades available
DST2, Turbo – Pumped Desktop Dual Sputter Coater:
The large chamber Duel magnetron cathode, water-cooled, is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter. The unlimited sputtering time makes it suitable for deposition of thick layer. The system is equipped with 800 W DC power supplies, 300 W RF power supply (optional) with matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation
DST3: Turbo – Pumped Desktop triple Sputter Coater:
The large chamber DST3 3 2” magnetron cathodes, water-cooled, is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter. The unlimited sputtering time makes it suitable for deposition of thick layer. The system is equipped with 800 W DC power supplies, 300 W RF power supply (optional) with matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation
Desktop Sputter coater model DST has the flowing options and accessories:
Planetary sample rotation
Fibre carbon Evaporation
Wire evaporation
Boat evaporation
Substrate DC bias voltage (DST1-3).
Substrate Heating
RF for oxide sputtering
Substrate heater 500c (DST1-4).
300W RF sputtering (DST1-4).
Quartz crystal.
Spare glass.
Sputtering targets.
