Turbo-Pumped Sputter Coater DST1-170
SEM Coaters | Sputter Coaters
SEM/TEM sample prep Vac Techniche
Presenting the DST1-170, a cutting-edge high-vacuum magnetron desk sputter coater. This compact coating system stands out for its versatility, capable of coating both oxidizing and non-oxidizing metals efficiently. Ideal for short-term deposition needs, the DST1-170 excels at swiftly producing uniform thin films with fine-grained textures. Experience rapid yet precise coating cycles with this innovative solution.
With one of the smallest benchtop footprints, the vac Coat DST1-170 provide DC sputtering for high resolution SEM and TEM sample preparation.
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Desktop Sputter Coater | DSR1
The Desk Magnetron Sputter Coater (DSR1) is a highly productive tool known for delivering consistent and highly repeatable results within a fully automated system. Its ergonomic design and small footprint make the DSR1 SEM coating system easy to use.
Providing high resolution definition coatings with repeatable results due to the Auto process control, allowing easy set and operation.
The DST1-170 can also be used for general metal sputtering for optics and thin film coatings. Sample rotation is standard, with tilt and height adjustment for most applications. Vac Techniche also have a range of larger Turbo pumped sputter coaters with options of 1 to 3, 2″ magnetrons, RF and DC, sample heating, this range is the DST1-300 range.
The DST1-170 can also be used for general metal sputtering for optics and thin film coatings.
DST1-170 can be equipped with a water-cooled cathode which make it suitable for long time deposition.
The maximum size of substrates in this model could be 4 inches.
DST1 can be equipped with a water-cooled cathode which make it suitable for long time deposition.
The maximum size of substrates in this model could be 4 inches.
Touch Screen Control
The DST1-170 features a 7” colored touch screen and user-friendly software for seamless control. Its full automatic control allows easy adjustment of deposition process data, with vacuum and coating sequence information displayed digitally or as curves on the screen. Plus, it conveniently saves details of the last 300 coatings for quick reference.
Sample Holders
The DST1 offers versatile sample stage configurations to suit various user needs. Its standard rotatable sample stage boasts adjustable height and angle for easy customization. Users can effortlessly switch between configurations as needed. For uniform coating of porous specimens, the optional rotary planetary sample stage is an excellent choice.
Newly Designed Sample Holder
A new 4-inch rotating sample holder is designed for the system to increase the deposition area and the number of coating stubs in a run (Customizable for max. 50×1 mm stubs).
DST1-170 Clean VacuumPulsed Carbon Fiber Upgrade option
The vacuum chamber is Cylindrical Pyrex. The DST1-170 is fitted with an internally mounted 90 L/s turbomolecular pump, backed by a 6 m3/h two stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
DST1-170 EvaporationPulsed Carbon Fiber Upgrade option
The compact desk vacuum sputter and carbon coater, designed for a small chamber, features an impressive capability to execute pulsed carbon fiber evaporation. The use of short pulses in this process results in a finer degree of control during deposition and, as a notable benefit, leads to a substantial reduction in the generation of debris that is typically linked with conventional carbon deposition methods. This advancement not only enhances coating precision but also greatly mitigates the challenges posed by debris, making it a valuable tool for researchers and professionals across various fields.
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Turbo-Pumped Sputter Coater | DST1-170
High vacuum turbo pump.
Diaphragm backing pump.
Full range vacuum gauge.
Carbon fibre evaporation (Upgrade option DSCT)
Pulsed or flash carbon fibre coating modes (Upgrade option DSCT)
High precision quartz crystal thickness monitor.
Intuitive touch screen to control the coating process and rapid data input
User friendly software that can be updated via network.
Controls coating rate to achieve finer grain structures.
Manual or automatic Timed and Thickness sputtering.
Able to record and plot coating parameters graphs.
Equipped with electronic shutter.
Easy-to-change specimen stages (rotation stage as standard).
Two-year warranty.
DST1, Turbo – Pumped Desk Sputter Coater: The magnetron desk sputter coater model DST1 is a compact coating system with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time.The DST1 is equipped with a magnetron cathode with diameter of the cathode could be 2-4 inches depending on the requirement.
DST1 – 2: The DST1-2 is configured as a sputter coater and fibre carbon coater (optional) with interchangeable heads in one instrument suitable for Scanning Electron Microscope (SEM) sample preparation.This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD.The DST1-2 with a 2” magnetron cathode, 300 W RF power supply (optional) with matching box, 80 W switching DC power supply and high current power supply for carbon evaporation (optional), could be used for research and different thin film applications
DST1 – 4: The large chamber DST1-4 with a 4” magnetron cathode, water-cooled, is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter. The unlimited sputtering time makes it suitable for deposition of thick layer. The system is equipped with 800 W DC power supplies, 300 W RF power supply (optional) with matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation
Intuitive touchscreen interface for controlling the coating process and quick data entry.
User-friendly software that can be updated remotely.
Adjusts coating rate for improved grain structure quality.
Option for semi-automatic to fully automatic coating processes.
Repeatable and programmable sputtering operations in automatic mode.
Manual or automated control of deposition by time and thickness.
Capability to document and display graphs of coating parameters.
Stores multiple coating recipes for consistent deposition outcomes.
Ultimate Vacuum: Less than 2×10-6 torr.
Controls the rate of sputtering to achieve finer grain structure.
Automatically controls the power of sputtering independent of pressure.
Precision Mass Flow meter (MFC) for fine control of the vacuum pressure
Able to record and plot coating parameter graphs.
Transfers curves and deposition process data by USB port to PC.
Utilities: 220V- 50HZ- 16A.
Shipping Weight (DST1-2): 28kg.
Shipping Weight (DST1-4): 36kg
Desk Sputter coater model DST1-170 has the flowing options and accessories:
Carbon fiber evaporation head (DSCT)
Carbon Rod evaporation Head (DSCT)l.
Planetary sample rotation.
Spare glass.
Sputtering targets.
Dry pump upgrade
Sputtering targets
Carbon Fibre
