Vacuum Technology & Application Consultancy

DST1-170 Turbo-Pumped Sputter Coater

Desktop Coater System

SEM/TEM sample prep Vac Techniche

With one of the smallest benchtop footprints, the vac Coat DST1-170 provide DC sputtering for high resolution SEM and TEM sample preparation.

Providing high resolution definition coatings with repeatable results due to the Auto process control, allowing easy set and operation.

The DST1-170 can also be used for general metal sputtering for optics and thin film coatings.

DST1-170 can be equipped with a water-cooled cathode which make it suitable for long time deposition.
The maximum size of substrates in this model could be 4 inches.

Touch Screen Control

DST1-170 Turbo-Pumped Sputter Coater with 7-inch color touchscreen and full automatic control and data input allows even inexperienced users to operate the system.
Vacuum, current, and deposition information are displayed as digital data or curves on the touchscreen. The system also saves information on the last 300 coatings in a history page.

Sample Holders

The DST1 accommodates diverse user requirements through its range of sample stage options. The standard sample stage is designed for easy adjustments in both height and angle, while for those seeking uniform coating of porous specimens, an optional rotary planetary sample stage is available. This versatility ensures that the DST1 is adaptable to a wide range of coating needs.

DST1-170 Options
Desk Sputter Coater

The DST1-170 can also be used for general metal sputtering for optics and thin film coatings. Sample rotation is standard, with tilt and height adjustment for most applications. Vac Techniche also have a range of larger Turbo pumped sputter coaters with options of 1 to 3,  2″ magnetrons, RF and DC, sample heating, this range is the DST1-300 range.

DST1-170 Evaporation
Pulsed Carbon Fiber Upgrade option

The compact desk vacuum sputter and carbon coater, designed for a small chamber, features an impressive capability to execute pulsed carbon fiber evaporation. The use of short pulses in this process results in a finer degree of control during deposition and, as a notable benefit, leads to a substantial reduction in the generation of debris that is typically linked with conventional carbon deposition methods. This advancement not only enhances coating precision but also greatly mitigates the challenges posed by debris, making it a valuable tool for researchers and professionals across various fields.

DST1-170 Turbo-Pumped
More Details

  • High vacuum turbo pump.
  • Diaphragm backing pump.
  • Full range vacuum gauge.
  • Carbon fibre evaporation (Upgrade option DSCT)
  • Pulsed or flash carbon fibre coating modes (Upgrade option DSCT)
  • High precision quartz crystal thickness monitor.
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network.
  • Controls coating rate to achieve finer grain structures.
  • Manual or automatic Timed and Thickness sputtering.
  • Able to record and plot coating parameters graphs.
  • Equipped with electronic shutter.
  • Easy-to-change specimen stages (rotation stage as standard).
  • Two-year warranty.
DST1, Turbo – Pumped Desk Sputter Coater: The magnetron desk sputter coater model DST1 is a compact coating system with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time.The DST1 is equipped with a magnetron cathode with diameter of the cathode could be 2-4 inches depending on the requirement.

DST1 – 2: The DST1-2 is configured as a sputter coater and fibre carbon coater (optional) with interchangeable heads in one instrument suitable for Scanning Electron Microscope (SEM) sample preparation.This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD.The DST1-2 with a 2” magnetron cathode, 300 W RF power supply (optional) with matching box, 80 W switching DC power supply and high current power supply for carbon evaporation (optional), could be used for research and different thin film applications

DST1 – 4:
 The large chamber DST1-4 with a 4” magnetron cathode, water-cooled, is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter. The unlimited sputtering time makes it suitable for deposition of thick layer. The system is equipped with 800 W DC power supplies, 300 W RF power supply (optional) with matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation
  • Ultimate Vacuum: Less than 2×10-6 torr.
  • Controls the rate of sputtering to achieve finer grain structure.
  • Automatically controls the power of sputtering independent of pressure.
  • Precision Mass Flow meter (MFC) for fine control of the vacuum pressure
  • Able to record and plot coating parameter graphs.
  • Transfers curves and deposition process data by USB port to PC.
  • Utilities: 220V- 50HZ- 16A.
  • Shipping Weight (DST1-2): 28kg.
  • Shipping Weight (DST1-4): 36kg
Desk Sputter coater model DST1-170 has the flowing options and accessories:
  • Carbon fiber evaporation head (DSCT)
  • Carbon Rod evaporation Head (DSCT)l.
  • Planetary sample rotation.
  • Spare glass.
  • Sputtering targets.
  • Dry pump upgrade
  • Sputtering targets
  • Carbon Fibre
The vacuum chamber is a Cylindrical Pyrex with 300 mm OD and 200 mm H (DST1-4) / 170 mm OD x 140 mm H (DST1-2). The DST1 is fitted with an internally mounted turbomolecular pump, backed by a diaphragm pump which introduces clean vacuum without oil contamination which normally present in ordinary diffusion pump.

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Specialising in materials deposition, Vac Techniche has developed working relationships with key Universities and researchers facilities world wide.

Aticles & Blog Information

Specialising in materials deposition, Vac Techniche has developed working relationships with key Universities and researchers facilities world wide.

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