Vacuum Technology & Application Consultancy

DTE-Desktop Thermal Evaporation

Desktop Coater System

SEM/TEM sample prep Vac Techniche

DTE is a Desktop Thermal Evaporator system to deposit thin layers of materials on the substrate for research purposes and investigation by electron microscopy. DTE is configured as a material evaporator suitable for sample evaporant experiments. This low-budget, small chamber, and high-vacuum system is ideal for short time deposition of noble and oxidizing metals.

The system is equipped with a 1.2 kW high-current DC power supply. The system can deposit a thin layer of the evaporant material on different surfaces for different applications, such as SEM sample preparation.

Touch Screen Control

DTE is equipped with a 7” colored touch-screen panel using user-friendly software to control the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.

Sample Holders

The DTE deposition system offers the versatility of both upward and downward metal evaporation configurations.
For upward deposition, the material is loaded into a boat source, and the sample is affixed to the chamber’s S-Clips, facilitating convenient access.
In the case of downward deposition, a small quantity of the desired material is loaded into a basket with the option to use a rotating sample holder on the baseplate.

DTE Operation Requirements

DTE is equipped with a high current power supply and low-voltage (resistive) thermal evaporation platform suitable for a wide variety of thermal evaporation applications. The system allows controlled thermal evaporation of a wide range of materials onto the substrate. Different types of thermal evaporation sources (boat, basket, and coil) can be installed on the single thermal source holder.

DTE-Desk Thermal Evaporation
More Details

  • Material evaporation semi-automatic control
  • Equipped with a separate DC high-current power supply (max. 12V, 100A)
  • 170 mm diameter Borosilicate-SST vacuum chamber
  • High vacuum level with built-in turbo pump (Leybold 90 l/s)
  • Two-stage rotary (optional diaphragm or scroll) backing pump
  • Quartz crystal monitoring system for real time thickness measurement (1 nm precision)
  • Electronic shutter
  • Two high-current electric feed-throughs for thermal source insertion
  • Movable thermal source holder with possible upward or downward deposition configurations
  • Automatic venting valve
  • Full range vacuum gauge
  • S-Clip sample holder on the chamber lead
  • 2-inch rotating sample holder on the base plate (optional)
  • Sample rotation, height and tilt adjustable (for optional 2-inch sample holder)
  • Two-year warranty
  • Metal thin Films
  • Nano & Microelectronic
  • Solar cell applications
  • Thin film sensors
  • Fine grain structural deposition for SEM & FE-SEM sample preparation
  • Carbon fiber evaporation in flash mode for SEM sample preparation
  • Ultimate Vacuum: Less than 4×10-6 Torr
  • Low-duration deposition process
  • Records and plots parameters displayed on the touch screen
  • Transfers curves and deposition process data by a USB port to PC
  • 0-12 V, 0-100 A DC high-current power supply
  • Utilities: 220V-110V, 50/60HZ- 6/8A
  • Instrument Dimensions: Metallic-cubic-H47 x D37 × W46 cm
  • Net Weight: 30 kg  (without backing pump)
The DTE has the following options and accessories:
  • Quartz crystal sensor
  • Spare glass chamber
  • Sealing gaskets
  • Boats and baskets
  • The vacuum chamber is with 170 mm OD and 140 mm H.
  • The DTE is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 6m3/h two-stage rotary vane pump (optional).

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Specialising in materials deposition, Vac Techniche has developed working relationships with key Universities and researchers facilities world wide.

Articles & Blog Information

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