DTE-Desktop Thermal Evaporation
Desktop Coater System
SEM/TEM sample prep Vac Techniche
DTE is a Desktop Thermal Evaporator system to deposit thin layers of materials on the substrate for research purposes and investigation by electron microscopy. DTE is configured as a material evaporator suitable for sample evaporant experiments. This low-budget, small chamber, and high-vacuum system is ideal for short time deposition of noble and oxidizing metals.
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The system is equipped with a 1.2 kW high-current DC power supply. The system can deposit a thin layer of the evaporant material on different surfaces for different applications, such as SEM sample preparation.
Touch Screen Control
DTE is equipped with a 7” colored touch-screen panel using user-friendly software to control the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.
Sample Holders
The DTE deposition system offers the versatility of both upward and downward metal evaporation configurations.
For upward deposition, the material is loaded into a boat source, and the sample is affixed to the chamber’s S-Clips, facilitating convenient access.
In the case of downward deposition, a small quantity of the desired material is loaded into a basket with the option to use a rotating sample holder on the baseplate.
DTE Operation Requirements
DTE is equipped with a high current power supply and low-voltage (resistive) thermal evaporation platform suitable for a wide variety of thermal evaporation applications. The system allows controlled thermal evaporation of a wide range of materials onto the substrate. Different types of thermal evaporation sources (boat, basket, and coil) can be installed on the single thermal source holder.
DTE-Desk Thermal EvaporationMore Details
Material evaporation semi-automatic control
Equipped with a separate DC high-current power supply (max. 12V, 100A)
170 mm diameter Borosilicate-SST vacuum chamber
High vacuum level with built-in turbo pump (Leybold 90 l/s)
Two-stage rotary (optional diaphragm or scroll) backing pump
Quartz crystal monitoring system for real time thickness measurement (1 nm precision)
Electronic shutter
Two high-current electric feed-throughs for thermal source insertion
Movable thermal source holder with possible upward or downward deposition configurations
Automatic venting valve
Full range vacuum gauge
S-Clip sample holder on the chamber lead
2-inch rotating sample holder on the base plate (optional)
Sample rotation, height and tilt adjustable (for optional 2-inch sample holder)
Two-year warranty
Metal thin Films
Nano & Microelectronic
Solar cell applications
Thin film sensors
Fine grain structural deposition for SEM & FE-SEM sample preparation
Carbon fiber evaporation in flash mode for SEM sample preparation
Ultimate Vacuum: Less than 4×10-6 Torr
Low-duration deposition process
Records and plots parameters displayed on the touch screen
Transfers curves and deposition process data by a USB port to PC
0-12 V, 0-100 A DC high-current power supply
Utilities: 220V-110V, 50/60HZ- 6/8A
Instrument Dimensions: Metallic-cubic-H47 x D37 × W46 cm
Net Weight: 30 kg (without backing pump)
The DTE has the following options and accessories:
Quartz crystal sensor
Spare glass chamber
Sealing gaskets
Boats and baskets
The vacuum chamber is with 170 mm OD and 140 mm H.
The DTE is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 6m3/h two-stage rotary vane pump (optional).
