DST2-TGB Glovebox Sputter and Thermal Evaporation
Desktop Sputter System
Vac Techniche Vacuum Coating Systems
The DST2-TG, Double-target Turbo Pumped Sputter Coater with Thermal evaporator for Glove box use, is a multi-vacuum coater system that combines thermal evaporator and sputter coater in one single compact desktop system with remote system control through a Wi-Fi connection, controllable by both touch screen and PC. The high vacuum system is suitable for the deposition of a wide range of materials.
Double magnetron target desk sputter coater can easily switch between evaporation and sputtering deposition for the preparation of multilayer coatings.
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Glove box systems provide a protected environment for sensitive material, preventing any contact with air or humidity and unwanted interactions. DST2-TG high-vacuum coating system with glove box offers safe and clean substrate handling before or after a deposition process under inert gas atmosphere, and a highly controllable chamber environment, contributing to high purity thin layer deposition under high vacuum conditions.
Touch Screen Control
DST2-TG is equipped with a 7” colored touch-screen panel using user-friendly software to control and adjust the deposition process data. The panel window is also made available on pc through a Wi-Fi connection. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.
DST2-TGBEquipped
The sputter coater system can be equipped with optional facilities including:
RF power supply with an auto-adjustable matching box which minimizes the reflected power in the RF sputtering process,
Plasma cleaner for removing organic matter from the substrate surface before thin film deposition
DST2-TGB Glove box System
Glove box systems provide a protected environment for sensitive material, preventing any contact with air or humidity and unwanted interactions. DST2-TG high-vacuum coating system with glove box offers safe and clean substrate handling before or after a deposition process under inert gas atmosphere, and a highly controllable chamber environment, contributing to high purity thin layer deposition under high vacuum conditions.
DST2-TGB Magnetron Desk Sputter Coater
The DST2-TG Magnetron Desk Sputter Coater is a high-precision semi/fully automated vacuum coating system equipped with a large chamber (300 mm diameter) and two 2” diameter water-cooled cathodes, which make it suitable for long-time deposition. The system is a single platform for sputtering, carbon fiber, and metal evaporation. The magnetron desk sputter coater can sputter semiconductors, dielectrics, and metal targets. Sputtering cathodes and thermal evaporation boats could be installed together or interchangeably, with an overall three deposition sources accessible. Carbon deposition is also made possible by utilizing carbon fiber.
DST2-TGB Glovebox Sputter and Thermal Evaporation More Details
Combination of sputter coater and thermal evaporator for glovebox mounting
Built-in turbomolecular pump
Large chamber: Dia. 30 cm, Height. 20-25 cm
Easy and quick target installation: No target holder needed
Boosted heat conduction utilizing targets with backing plate
Rotating sample holder
Glovebox mounted KF40 feedthroughs for power supplies (DC, RF, high current), vacuum pump hose, water cooling and argon/reactive gas connections, and electrical connections.
Gas injection control through MFCs
Two-precision quartz crystal thickness sensors
Vac coat Products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
Safe and clean substrate handling before or after a deposition process under inert gas atmosphere in the glove box mounted chamber
Ultimate Vacuum: Less than 8×10-6 Torr
Highly controllable chamber environment and high purity thin layer deposition inside the glove box
Easy and quick target installation without need to target holder
Improved heat conduction utilizing targets with backing plate
Independent sputtering control rate for each cathode to produce fine grain structures
Automatic safe control of the cathode’s temperatures to protect the life time of the magnets
Data is rapidly registered by using fully automatic touch screen control
Two precision Mass Flow meter (MFC) for fine control of vacuum and pressure
Records and plots coating parameters graphs.
Transfers curves and deposition process data by a USB port or via Wi-Fi connection to PC
0- 1200 V, 0-500 mA DC power supply
Utilities: 220V-110V, 50/60HZ- 16/25A.
Instrument Dimensions: 550 Width x 600 Depth x 600 Height mm
Net Weight:120kg (pump, rack and instrument case)
Intuitive touch screen to control the coating process and rapid data input
User friendly software, updatable via network
Semi-Fully automatic coating process (optional)
Software controllable vertical movement of the vacuum glass chamber
Manual or automatic Timed and Thickness deposition
Controlling the deposition process from pc through a Wi-Fi connection
Storing coating recipes for repeatable depositions
Target selection for multilayer thin films
Electronic shutters
Automated cathode selection
Quartz crystal sensor
Spare glass chamber
Sputtering targets
Sealing gaskets
