2” Magnetron Sputtering
GT02 and GT20
VacTechniche's GT02 and GT20 2” magnetron sputtering sources are designed for precision thin-film deposition in advanced material research and industrial applications.
Compact Design: Ensures efficient utilization of chamber space while providing optimal target utilization.
Superior Performance: Engineered for uniform deposition, high target utilization rates, and minimized contamination.
Versatile Compatibility: Compatible with a wide range of materials, including metals, alloys, and ceramics.
Robust Construction: Built for durability and consistent performance in high-vacuum environments.
These sputtering sources are tailored to meet the needs of cutting-edge R&D facilities and production setups, delivering reliability and precision every time.
More Information
Sputtering RF and DC Magnetrons
DC Sputtering
Also known as Direct Current Diode Sputtering and it is the most basic type of sputtering. Ionized Argon cations are accelerated towards the cathode with the use of a negative bias voltage. Upon the collision of Argon with the cathode (where the target material is placed), species from the target source are ejected and subsequently get deposited on the substrate.
RF Sputtering
It is ideal for use with electrically insulating or dielectric target materials or substrates such as ceramics. It allows a much lower Argon pressure than the DC counterpart (1-15 mTorr vs 100 mTorr) to be used, which in turn reduces the concentration of gas impurities and in the chamber while also improving the deposition’s line of sight due to fewer gas collisions.
Magnetron Sputtering
This sputtering feature greatly increases the sputtering rate by concentrating ions and electrons in a confined region above the cathode. By trapping electrons near the target material using a magnetic field, the ionization of Argon is greatly increased while also further lowering the gas pressure to 0.5 mTorr to improve the deposition’s line of sight even more.
The characteristics above offer improved deposition rate decreased impurities of coatings and allow for operating under lower substrate temperatures in depositions. This type of sputtering can be used in conjunction with a DC or RF power source.
Magnetron-2 inches
Features
Wide Uniform Erosion Area results in stable operation, minimal distribution & uniformity/rate changes throughout the target lifetime.
Active Plasma Discharge on nearly entire target surface keeps target clean & reduces insulating film growth that leads to arcing.
External manifolds & other plasma disturbing hardware that increases required periodic maintenance frequency is unnecessary.
Available in 2” Diameter Targets.
Internal and Flange Mount Configurations.
Can be Used in DC, Pulsed DC, RF Modes.
70-90 W t% Target Utilization
Fully Stochiometric Dielectric Materials at Low Pressures & Temperatures.
20% Higher rates due to broad erosion area & highly efficient cooling.
Mechanical Specifications Table
GT02& GT20 | 2” Magnetron Sputtering
| Model | Head Mount style | Target Diam | Target Thickness | Magnetic material | Dim.A | Dim.B | Dim.C | Dim.E | Dim.D |
|---|---|---|---|---|---|---|---|---|---|
| GT02 | Axial | 1.0" (25.4 mm) | 2 mm | Yes | 41.4 mm | 44.5 mm | 80 mm | 110 mm | 180 mm |
| GT20 | Axial | 1.0" (25.4 mm) | 2 mm | Yes | 41.4 mm | 44.4 mm | 80 mm | 110 mm | 110 mm |
Technical Specification
GT02& GT20 | 2” Magnetron Sputtering
| Title | GT02 | GT20 |
|---|---|---|
| Diameter | 2.0" (50.8mm) | 2.0" (50.8mm) |
| Thickness | up to 1/4" for non-magnetic target; up to 1/16" for magnetic target | up to 1/4" for non-magnetic target; up to 1/16" for magnetic target |
| Utilization | up to 70% | up to 70% |
| Plasma Source | DC (Max.) 250 W | DC (Max.) 250 W |
| RF (Max.) 300 W | RF (Max.) 300 W | |
| Water Cooling (Required) | Flow Rate requirement: 1/2 GPM, filtered | Flow Rate requirement: 1/2 GPM, filtered |
| Water Inlet Temperature: <20 C | Water Inlet Temperature: <20 C | |
| Water hook up: 0.25" O.D Tube. | Water hook up: 0.25" O.D Tube. | |
| Please inform us the tube size of your water chiller, we can pre-install the fitting for you at extra cost. | Please inform us the tube size of your water chiller, we can pre-install the fitting for you at extra cost. | |
| Water connection: | 0.25 inch pneumatic pipe | 0.25 inch pneumatic pipe |
| Electrical Connector: | Standard N type (DC and RF) | Standard N type (DC and RF) |
| Warranty | One year limited with lifetime support | One year limited with lifetime support |
| Vacuum Flange with Feedthrough (Optional) | 6" CF flange with a high vacuum feedthrough is available upon request at extra cost. The sputtering head can be easily installed on the 6'' CF vacuum flange through the quick disconnector. The height position of the sputtering gun can be manually adjusted inside the vacuum chamber. | 6" CF flange with a high vacuum feedthrough is available upon request at extra cost. The sputtering head can be easily installed on the 6'' CF vacuum flange through the quick disconnector. The height position of the sputtering gun can be manually adjusted inside the vacuum chamber. |
| Net Weight | 3.5lbs | 5.5lbs |
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Specialising in materials deposition, Vac Techniche has developed working relationships with key Universities and researchers facilities world wide.
Magnetron-2″ Catalogue
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Frequently Asked Questions
Sputtering RF and DC Magnetrons
A 2" magnetron is a microwave-generating device used in various applications such as radar systems and microwave ovens. The "2 inches" refers to the diameter of the cavity resonator within the magnetron, which influences the frequency of the microwaves produced.
A 2" magnetron works by emitting high-frequency electromagnetic waves. Electrons emitted from a heated cathode spiral outward due to a magnetic field, interacting with cavity resonators to generate microwave radiation.
Common applications include microwave ovens, radar systems, and certain industrial heating processes. In microwave ovens, it is used to heat and cook food, while in radar systems, it helps in detecting objects by emitting microwaves and analysing the reflected signals.
Proper functioning can be ensured by regularly checking for signs of wear or damage, maintaining a clean operating environment, and ensuring that the cooling system is functioning correctly to prevent overheating.
Yes, a 2" magnetron can often be repaired, but the feasibility depends on the nature of the failure. Common issues such as filament burnout or cavity damage may require professional repair or replacement of the magnetron.
Safety precautions include:
Ensuring the device is powered off and unplugged before handling.
Avoiding direct contact with the high-voltage components.
Using proper protective equipment to prevent exposure to microwave radiation.
Following manufacturer guidelines for maintenance and repair.
The lifespan of a 2" magnetron varies depending on usage and operating conditions but typically ranges from 1,000 to 2,000 hours of operation. Regular maintenance can help extend its lifespan.
Signs of failure include:
Inconsistent or reduced microwave output.
Unusual noises during operation.
Overheating or burning smells.
Visual damage to the magnetron or surrounding components.
Articles & Blog Information
Do you Still need more details?
When it comes to high-quality coating solutions, our Desktop Sputter Coater stands out as a top choice for many professionals. This device is part of our broader range of Desktop Coaters, designed to meet various needs in the field of material science.
Our Desktop Sputter Coater utilizes the process of sputter coating, a technique widely used in various industries for its ability to create thin films with excellent uniformity and adhesion. This makes it an ideal choice for applications in SEM and TEM.
For those seeking a more advanced solution, we offer the Turbo Pumped Desk Sputter Carbon Coater. This device combines the benefits of sputter coating with the added functionality of carbon coating, making it a versatile choice for many applications.
We also have the DST1-170 Turbo Pumped Desktop Sputter Coating System, a high-performance coater that offers turbo-pumped sputter coating for the most demanding tasks.
Lastly, for those specifically interested in carbon coating, we offer the Desktop Carbon Coating System. This compact device is designed to provide high-quality carbon coating, making it an excellent choice for a wide range of applications.
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