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RF Plasma Generators 600W

RF Generators

RF Generators for Sputtering and Plasma generation 100w, 200w, 300w,600w up to 5000w

RF Generators for Sputtering and Plasma generators manufactured by Vac Techniche Ltd are reliable devices for industrial and laboratory deposition, plasma generation, and even dielectric heating and melting. This device is also one of the most important components of semiconductor manufacturing systems, used for producing integrated circuits (ICs) and chips present in modern computers and electronic equipment. The Vac Techniche RF generator along with its impedance matching network constitute a complete RF plasma generation assembly.

The RF generator is designed and built with 27.12 MHz, 13.56 MHz, 2 MHz or other frequency bands according to the customer .

This frequency is one of the most commonly used in the industrial, scientific, and medical (ISM) radio bands. This band allows for high-power activities without causing any disturbance in the surrounding telecommunications systems since it is for general use. Generators with powers ranging from a few milliwatts to several hundred kilowatts are used in this band.
Designing these generators is a combination of radiofrequency electronics, advanced power amplifier protection, closed-loop control, and high safety factors.
Simple manufacture and repair procedures and a very high efficiency are some of the unique qualities of this product. Other features include security against generation of electromagnetic interference, continuous operation capability, ease of operation and control, declaring the type of the produced errors, display of transmitted and reflected power, 0-5 V input voltage for controlling the output power of the generator (optional), analog output for transmitted and reflected power values (optional), the capability of limiting the reflected power, and a compressed air cooling system.
Vac Techniche produces this equipment in models ranging from 100 W up to 15 kW with semiconductor components and up to 100 kW with amplifiers based on vacuum tubes.
RF150W
RF300W
Design in conjunction with Vac Techniche Matching network 
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Features
Catalogue
300W RF Generators and Plasma generation

More Details

RF Plasma Generators 300W

  • Reflected power limiter
  • Air-cooling (DC to RF conversion efficiency larger than 70%)
  • Graphical control, display and adjustment system with a touch screen
  • Various protection types (against reflected power, overtemperature, overcurrent, and overvoltage), capable of automatically limiting the transmitted power
  • 0-5 V input voltage for remotely controlling the generator output power; more than 90% efficiency for larger than 300 W models
  • Analog output for transmitted and reflected power values
  • Closed-loop control of output power which stabilizes the adjusted power with time
  • Adequate shielding to prevent radiation and EMI noise with necessary measures to protect operator health
  • Rack-installable box
Power supply220 V (200-240 V), 50 Hz (50-60 Hz)
Output frequency13.56 MHz
ProtectionVarious types (protection against reflected power, overtemperature, overcurrent, and overvoltage), especially reflected power limiter
DisplayGraphic display with touch screen or digital display
Remote controlDigital RS485
Working temperature10-40°C
CoolingAir conditioned
Output impedance50Ω(resistive)
Dimensions (cm)Depends on device output
WeightDepends on device output
Output connectorN – 7/16
Box materialaluminium
 


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Specialising in materials deposition, Vac Techniche has developed working relationships with key Universities and researchers facilities world wide.
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RF Plasma Generators 600W Catalogue

VacTechniche RF Generators

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Frequently Asked Questions

RF Plasma Generators 600W

An RF Plasma Generator uses radio frequency (RF) power to ionize gases, creating plasma. This plasma is utilized in various industrial applications, such as surface modification, cleaning, and coating. The RF plasma system achieves this by applying an RF voltage to a gas, generating a field that ionizes the gas molecules and produces plasma.
 
Our RF Plasma Generators in the 100-300W range are ideal for applications such as:
  • Surface activation
  • Etching and coating in microelectronics
  • Medical device manufacturing
  • Thin film deposition and precision cleaning
Our RF Plasma Generators offer precise power control, allowing users to adjust the output between 100W and 300W. This flexibility supports various process requirements and can be customized based on the specific application.
 
Our RF Plasma Generators offer precise power control, allowing users to adjust the output between 100W and 300W. This flexibility supports various process requirements and can be customized based on the specific application.
Regular maintenance is minimal but essential for optimal performance. This typically includes checking connections, inspecting for gas leaks, and ensuring the generator’s internal cooling system is functioning correctly.
Yes, VacTechniche provides full technical support for installation, calibration, and troubleshooting of our RF Plasma Generators. Contact our support team for any assistance needed.
 
 
Operators should follow all safety guidelines, including proper ventilation, handling of gases, and using protective equipment. Our equipment includes built-in safety features, but we recommend following all standard operating procedures to ensure safe use.
 
With regular maintenance, our RF Plasma Generators have an extended operational lifespan, with most units designed for continuous, high-performance use in industrial environments.
 
 
Our RF Plasma Generators offer precise power control, allowing users to adjust the output between 100W and 300W. This flexibility supports various process requirements and can be customized based on the specific application.

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RF Plasma Generators 600W

For 2″ Magnetron Sputtering and Plasma generation

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