Vacuum Technology & Application Consultancy

DTT-Turbo Triple Thermal Evaporation

SEM/TEM Coater System

Vac Techniche Vacuum Coating Systems

The Vac Techniche triple thermal source desktop coater provides a very versatile thermal evaporation system for a vast range of source materials in various forms from wire, cord, pellets and powders, compatible with Boat/basket and coil source holders.
 

The control system allows upto 300 historical processed to be recorded.

Three independent heat resistance thermal evaporation sources.
Evaporation source holder designed causes no contamination from source materials on each other.
The length of the source holders can be adjusted in the range of 50mm~90mm.
Co-Evaporation upgrade available
Evaporation sources
  • Boat
  • Basket
  • Coil/Wire
Vacuum System consists of:
Heat resistant, Cylindrical Pyrex with 300 mm OD and 200 mm H.

90 L/s turbomolecular pump fitted directly to the vacuum envelop base plate and backed by a 6 m3/h two-stage rotary pump which introduces clean vacuum without the oil contamination that is normally present with an ordinary diffusion pump.

Dry backing pump option is also available
The DTT triple evaporation source selection is ideal for deposition of multilayers or alloys.

The DTT, with integral turbo pumping reaches pressure quickly allowing the coating process to commence in a matter of minutes. It is ideal for research, laboratory and product applications

Touch Screen Control

DTT-Turbo Triple Thermal Evaporation with 7-inch color touchscreen and full automatic control and data input allows even inexperienced users to operate the system.
Vacuum, current, and deposition information are displayed as digital data or curves on the touchscreen. The system also saves information on the last 300 coatings in a history page.

Triple Source
Evaporation

The triple-source evaporation or desk thermal evaporator with evaporation source (boat/basket/coil) selection system is ideal for deposition of multilayers or alloys.

DTT Evaporation
Turbomolecular Pump

90 L/s turbomolecular pump fitted directly to the vacuum envelop base plate and backed by a 6 m3/h two-stage rotary pump which introduces clean vacuum without the oil contamination that is normally present with an ordinary diffusion pump

Thermal Evaporation
Boat/Basket/Coil

The desk thermal evaporator can be fitted with three independent heat resistance thermal evaporation sources. The good design of the evaporation source holder causes no contamination from source materials on each other. The length of the source holders can be adjusted in the range of 5cm~9cm.

DTT-Turbo Triple Thermal Evaporation
More Details

  • Multi-layer thermal coatings
  • Large format chamber
  • High vacuum turbo pump 300 l/s
  • Diaphragm backing pump
  • Full range vacuum gauge
  • Evaporation source (boat / basket / coil) selection for multilayer thin film deposition
  • Co – evaporation to form alloy films
  • Quartz crystal monitoring system for real time thickness measurement (1 nm precision)
  • Manual mode, power, time control
  • Automatic Timed and Thickness deposition
  • Easy to use touch screen control panel
  • Rapid data input
  • User friendly
  • software that can be updated via network
  • Equipped with electronic shutter
  • Equipped with rotary sample holder
  • 500 °C irradiative substrate heater
  • two-year warranty
  • Multi boats, baskets and coils installation
  • Ultimate Vacuum: Less than 2×10-6 torr
  • In board processor records and plots coating parameters graphs
  • USB port for exporting deposition process data
  • Automatic control of: power and coating independent of pressure
  • High current electrical feed through
  • DC power supply, 0-100amp high current,
  • Short circuit protection,
  • Utilities: 220V- 50HZ- 16A
  • Dimensions: 60 Cm H × 65 Cm W × 50 Cm D
  • Shipping weight: ~ 60 kg
  • Metal & dielectric Films
  • Thin film coating
  • Optical coatings
  • Nano & Microelectronic
  • Medical Components
  • Magnetic devices
  • Thin film Multi-layer devices
The DTT has the flowing options and accessories:
  • High current power supply
  • Quartz crystal
  • Spare glass
  • Evaporation sources (boat / basket / coil)
  • Thermal source materials
  • Mass Flow Controller

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Specialising in materials deposition, Vac Techniche has developed working relationships with key Universities and researchers facilities world wide.

Articles & Blog Information

Do you Still need more details?
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